ELETTRORAVA
ELETTRORAVA HIGH VACUUM PRODUCTS AND THIN FILM DEPOSITION SYSTEMS
Elettrorava SpA is a company based in Torino (Italy) with a long established history in the design and manufacture of sophisticated vacuum equipment such as turbomolecular pumps and thin film deposition systems. Its extensive R&D efforts in the 1950’s resulted in the introduction of the first vertical turbomolecular pump which is now a standard item in ultra high vacuum systems. Elettrorava’s turbomolecular pump technology has been licensed to Varian, a leading international vacuum company; Elettrorava turbomolecular pumps have found extensive applications in thin film deposition system and other high vacuum and ultra high vacuum systems.
Elettrorava’s product line in thin film deposition systems includes:
- PECVD deposition systems (RF, VHF, MW and ECR)
- HWCVD deposition systems
- Sputtering deposition systems
- Electron beam deposition systems
- Ion beam deposition and ion beam assisted deposition systems
- Load lock chamber for manual and automatic loading of substrates under vacuum
- Multichamber systems incorporating one or more of the above technologies
Process guarantees for specific applications (semiconductor materials and electronic devices, metals, optical materials and devices, etc.) can be offered.
elettrorava s.p.a., 10078 Venaria - Torino Italy
Contact: Paolo RAVA (T. + -39-011-4240237) e-mail: paolo.rava@elettrorava.com