OPTICNANO

Founded in 2010, OPTICNANO [1] is a French company for consultancy expertise in the domain of nano technologies and surface analysis via scatterometry, polarimetry and ellipsometry. Support and direct advices are proposed to Industry and Research and Developments R&D laboratories associated with European, EU or national projects The company collaborates with multinational groups through EU projects contracts (EU EQUIPEX ), STM, Leti, CNRS, LPICM (polytechnique X), earlier with CNET France Telecom as well with first SE suppliers:Sopra(Semilab), Tencor, JY (Horiba) and within French atomic agency CEA labs.

Owner of a Film-Sense USA commercial licence [2], OPTICNANO imports an integrated metrology equipment: a Spectroscopic Ellipsometer, (SE) much cheaper and smaller than most regular SE instruments. This 4-Wide-Band-LEDs SE, (WBLSE), covers a full visible range, 350-800 nm and remains very innovative : a great ease of use, a maximum speed (10 ms), portability and remote control capability through WIFI network. The System is light and not invasive to vacuum when mounting to any process chambers with the need of a minimal footstep. Very easy to align, it has also various other benefits: a static optical beam including no rotating elements, sensitiveness to environment parameters, temperature, ambient light with no PEM or LC phase modulators, intense point light source with reduced noise as compared to Xe sources with live-time exceeding mostly 50,000 hours. The automatic calibration can be furthermore realized in few seconds. Distinct, continuous and dynamic data growth processing proceed in a definitely new philosophy.In ex situ configuration, the FS-1 remains one of the fastest mapping inspection tool with adaptive focussing micro lenses for industry quality control.

For further info visit our sites at [1] http://www.opticnano.euand [2] http://www.film-sense.com. The instrument is presented at Booth 75 for free demo even with customers samples.

OPTICNANO OpticNano Consult E.U.R.L SIREN533546560-NAF 7112B Optical Metrology and Polarimetry & Nanotechnologies Materials 126, route de Saint Donat F-38250 Lans en Vercors France

email : sales@opticnano.euphone + (33) 970 448271 and +(41)919451592 mobile +(33) 6 88 70 14 50