POLYGON PHYSICS

Polygon Physics designs and fabricates equipment for surface processing under vacuum, based on ECR technology. Our products include sources of ions, electrons, plasma, or atoms, and also complete systems for surface treatments. Applications are e.g. ion beam sputter deposition, ion implantation, sputter cleaning, nanostructuring, and ion milling.

Our unique technology is based on ultracompact and ultralow power ECR plasma cavities. This facilitates surface processing with multiple beams, as well as adapting the beam to the sample size by varying the number of cavities per source.