Annealsys manufactures Rapid Thermal Processing and Chemical Vapor Deposition systems for R&D and production. Process service is also available.

RTP / RTPCVD systems with vacuum and high temperature capability up to 2000°C. Pulse annealing for processing thermally sensitive substrates. Applications: contact annealing, oxidation, CVD of graphene and h-BN, selenization, silicon carbide implant annealing.

DLI-CVD / DLI-ALD systems with direct liquid injection (DLI) vaporizers for deposition of materials using the widest range of organometallic precursors. Multi process capability 2-inch system: DLI-CVD, DLI-ALD and RTP inside the same chamber. Applications: multi-metallic oxides, metals, nitrides, 2D materials.

Annealsys represents Veeco-CNT for ALD systems.


139 rue des Walkyries
34000 Montpellier
Phone: +33 467 20 23 63