scia Systems


scia Systems GmbH
AnnabergerStrasse 240
09125 Chemnitz


scia Systems manufactures advanced ion beam and plasma processing equipment, for the production of microelectronics, MEMS and precision optics, in both, high volume production as well as in research and development environments. scia Systems provides highly reliable tools together with a superior technology support.

The tools are flexible and modular in design. Several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements.

Technology Portfolio

  • Ion Beam Etching and Milling (IBE/IBM)
  • Ion Beam Trimming (IBT)
  • Physical Vapor Deposition (DIBD)
  • Reactive Ion Etching (RIE)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Plasma Cleaning