SwissLitho & Heidelberg Instruments

Technoparkstrasse 1

8005 Zurich


Phone: +41 44 500 3800



SwissLitho AG and Heidelberg Instruments joined forces in early 2018. Together, they offer the widest range of direct write micro- and nanolithography systems world-wide, from low-cost desktop solutions to high-end writers for substrates larger than 1m. Their products are used for prototyping in R&D, industrial manufacturing and academic research. A full wafer can be patterned in a few minutes with sub-µm resolution, making mask aligners obsolete. Single-nm resolution with simultaneous pattern inspection is achieved with the unique NanoFrazor technology. Systems from both companies can be used to obtain micro- and nanostructures with high aspect ratio as well as in grayscale mode making them particularly suitable to create templates for NIL applications.