CS CLEAN SOLUTIONS AG
Exhaust Gas Abatement
CS CLEAN SYSTEMS® has more than 30 years of experience in the semiconductor industry and is your reliable partner for exhaust gas treatment with a primary focus on dry bed absorption. In addition to the silicon and compound semiconductor industries, we also serve the rapidly-growing photovoltaic and MEMS industries.
Global sales as well as worldwide take-back and disposal services for spent absorber columns guarantee full customer satisfaction. CLEANSORB® dry bed removal of process waste gases, CLEANVENT mini absorbers for gas cabinet vent lines, and CLEAN-PROTECT absorber for emergency gas release. Plasma Conversion System PCS PIRANHA 2000 for removal of perfluorinated compounds (PFC’s) such as CF4, CHF3, SF6, NF3 etc.